Method of ono integration into logic CMOS flow

ABSTRACT

An embodiment of a method of integration of a non-volatile memory device into a logic MOS flow is described. Generally, the method includes: forming a pad dielectric layer of a MOS device above a first region of a substrate; forming a channel of the memory device from a thin film of semiconducting material overlying a surface above a second region of the substrate, the channel connecting a source and drain of the memory device; forming a patterned dielectric stack overlying the channel above the second region, the patterned dielectric stack comprising a tunnel layer, a charge-trapping layer, and a sacrificial top layer; simultaneously removing the sacrificial top layer from the second region of the substrate, and the pad dielectric layer from the first region of the substrate; and simultaneously forming a gate dielectric layer above the first region of the substrate and a blocking dielectric layer above the charge-trapping layer.

RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.14/824,051, filed Aug. 11, 2015, which is a continuation of U.S. patentapplication Ser. No. 13/434,347, filed Mar. 29, 2012, Now U.S. Pat. No.9,102,522, Issued Aug. 11, 2015, Which is a continuation in part of U.S.application Ser. No. 13/312,964 filed Dec. 6, 2011, Now U.S. Pat. No.9,023,707, Issued May 5, 2015. Which is a continuation of U.S.application Ser. No. 12/608,886, filed Oct. 29, 2009, Now U.S. Pat. No.8,071,453, Issued Dec. 6, 2011, claims the benefit of U.S. ProvisionalApplication No. 61/183,021, filed Jun. 1, 2009, and U.S. ProvisionalApplication No. 61/172,324, filed Apr. 24, 2009, all of which areincorporated by reference herein in their entirety.

TECHNICAL FIELD

Embodiments of the present invention relate to the field ofsemiconductor device.

The fabrication of integrated circuits for logic products typicallyincludes a baseline process for the production ofmetal-oxide-semiconductor field-effect transistors (MOSFET).Thicknesses, geometries, alignment, concentrations, etc. are stringentlycontrolled for each operation in such a baseline process to ensure thatthey are within specific tolerance range so that the resultant MOSFETswill function properly. For applications such as system-on-chipsilicon-oxide-nitride-oxide-semiconductor (SONOS) FETs are oftenintegrated into a MOSFET logic manufacturing process. This integrationcan seriously impact the baseline MOSFET process, and generally requiresseveral mask sets and expense.

BRIEF DESCRIPTION OF THE DRAWINGS

These and various other features and advantages of the present structureand method will be apparent upon reading of the following detaileddescription in conjunction with the accompanying drawings and theappended claims provided below, where:

FIGS. 1A-1D illustrate the formation of deep wells in the substrate, inaccordance with an embodiment of the present invention.

FIGS. 2A-2B illustrate removing a pad layer from a non-volatile deviceregion of a substrate, in accordance with an embodiment of the presentinvention.

FIG. 3A illustrates the formation of a dielectric stack, in accordancewith an embodiment of the present invention.

FIGS. 3B-3C illustrate multiple layer charge-trapping layers, inaccordance with an embodiment of the present invention.

FIG. 4 illustrates a patterned dielectric stack above a non-volatiledevice region of a substrate, in accordance with an embodiment of thepresent invention.

FIGS. 5A-5B illustrate the formation of doped channel regions, inaccordance with an embodiment of the present invention.

FIG. 6 illustrates the removal of a pad layer from a MOS device regionand the removal of a sacrificial top layer from a non-volatile deviceregion of a substrate, in accordance with an embodiment of the presentinvention.

FIG. 7A illustrates the formation of a gate dielectric layer andblocking dielectric layer, in accordance with an embodiment of thepresent invention.

FIGS. 7B-7C illustrate the formation of a blocking dielectric layerconsuming a portion of a charge-trapping layer, in accordance with anembodiment of the present invention.

FIG. 7D illustrates a multiple layer gate dielectric layer and multiplelayer blocking dielectric layer, in accordance with an embodiment of thepresent invention.

FIG. 8 illustrates the formation of a gate dielectric layer, inaccordance with an embodiment of the present invention.

FIG. 9 illustrates the formation of a gate layer above a substrate, inaccordance with an embodiment of the present invention.

FIG. 10 illustrates the patterning of MOS device and non-volatile devicegate stacks, in accordance with an embodiment of the present invention.

FIG. 11A illustrates a non-planar multigate device including a splitcharge-trapping region;

FIG. 11B illustrates a cross-sectional view of the non-planar multigatedevice of FIG. 11A. FIG. 11C illustrates a multigate device thatincludes a planar device.

FIG. 12 illustrates a flow diagram depicting sequences of particularmodules employed in the fabricating a non-planar multigate deviceintegrated with a logic MOS device;

FIGS. 13A and 13B illustrate a non-planar multigate device including asplit charge-trapping region and a horizontal nanowire channel.

FIG. 13C illustrates a cross-sectional view of a vertical string ofnon-planar multigate devices of FIG. 13A.

FIGS. 14A and 14B illustrate a non-planar multigate device including asplit charge-trapping region and a vertical nanowire channel.

FIG. 15A-15F illustrate a gate first scheme for fabricating thenon-planar multigate device of FIG. 14A.

FIG. 16A-16F illustrate a gate last scheme for fabricating thenon-planar multigate device of FIG. 14A.

DETAILED DESCRIPTION

Embodiments of the present invention disclose methods of ONO integrationinto a MOS flow. In the following description, numerous specific detailsare set forth, such as specific configurations, compositions, andprocesses, etc., in order to provide a thorough understanding of thepresent invention. In other instances, well-known processes andmanufacturing techniques have not been described in particular detail inorder to not unnecessarily obscure the present invention. Furthermore,it is to be understood that the various embodiments shown in the Figuresare illustrative representations and are not necessarily drawn to scale.

The terms “above,” “over,” “between,” and “on” as used herein refer to arelative position of one layer with respect to other layers. One layerdeposited or disposed above or under another layer may be directly incontact with the other layer or may have one or more intervening layers.One layer deposited or disposed between layers may be directly incontact with the layers or may have one or more intervening layers. Incontrast, a first layer “on” a second layer is in contact with thatsecond layer.

A method of integrating a non-volatile memory device and ametal-oxide-semiconductor (MOS) device is described. In an embodiment,the MOS device is a volatile memory device, logic device and/or analogdevice. While particular embodiments of the invention are describedherein with reference to a MOSFET device, it is understood thatembodiments are not so limited. In an embodiment, the non-volatilememory device is any device with an oxide-nitride-oxide (ONO) dielectricstack. In an embodiment, the non-volatile memory device is anerasable-programmable-read-only memory EEPROM device. In one embodiment,the non-volatile memory device is a floating gate FLASH device. Inanother embodiment, the non-volatile memory device is a non-volatilecharge trap memory device such as asemiconductor-oxide-nitride-oxide-semiconductor (SONOS). The first“semiconductor” in SONOS refers to a channel region material, the first“oxide” refers to a tunnel layer, “nitride” refers to a charge-trappinglayer, the second “oxide” refers to a blocking dielectric layer, and thesecond “semiconductor” refers to a gate layer. A SONOS-type device,however, is not limited to these specific materials. For example,depending upon the specific device, the charge-trapping layer couldinclude a conductor layer, semiconductor layer, or insulator layer.While the following embodiments of the present invention are describedwith reference to illustrations of a SONOS non-volatile memory device,embodiments are not limited to such.

In one aspect, embodiments of the invention disclose simultaneouslyforming the gate dielectric layer of a MOS device (e.g. MOSFET) and thetop ONO layer of a non-volatile memory device (e.g. the blockingdielectric layer a SONOS FET). Fabrication of the ONO dielectric stackmay be integrated into the baseline MOSFET manufacturing process forforming the MOSFET gate dielectric layer. A pad dielectric layer isformed above a volatile device region of a substrate. A patterneddielectric stack is formed above a non-volatile device region of thesubstrate. The patterned dielectric stack may comprise a tunnel layer,charge-trapping layer, and sacrificial top layer. The sacrificial toplayer is then removed from the dielectric stack in the non-volatiledevice region of the substrate. The pad dielectric layer is removed fromthe volatile device region of the substrate. Then, simultaneously, agate dielectric layer is formed above the volatile device region of thesubstrate and a blocking dielectric layer is formed above thecharge-trapping layer above the non-volatile device region of thesubstrate.

In another aspect, embodiments of the invention disclose forming thefirst oxide and nitride layers of an ONO dielectric stack prior toadding channel implants to the MOS device (e.g. MOSFET). The thermalbudget of forming the ONO dielectric stack may not impact the channeldopant profile for the MOS device. A pad dielectric layer is blanketdeposited or grown above the substrate. SONOS channel dopants areimplanted into the non-volatile device region of the substrate. The paddielectric layer is removed from the non-volatile device region of thesubstrate, and a dielectric stack is formed above the non-volatiledevice region of the substrate where the pad dielectric layer has beenremoved. The patterned dielectric stack may comprise a tunnel layer,charge-trapping layer, and sacrificial top layer. MOSFET channel dopantsare then implanted through the pad dielectric layer and into the MOSregion of the substrate. The pad dielectric layer is removed from theMOS device region of the substrate simultaneously with the sacrificialtop layer from the non-volatile device region of the substrate.

Referring to FIG. 1A, in an embodiment, the process begins with forminga protective pad layer 102 above the surface of a substrate 100.Substrate 100 may be composed of any material suitable for semiconductordevice fabrication. In one embodiment, substrate 100 is a bulk substratecomposed of a single crystal of a material which may include, but is notlimited to, silicon, germanium, silicon-germanium or a III-V compoundsemiconductor material. In another embodiment, substrate 100 includes abulk layer with a top epitaxial layer. In a specific embodiment, thebulk layer is composed of a single crystal of a material which mayinclude but is not limited to, silicon, germanium, silicon-germanium, aIII-V compound semiconductor material and quartz, while the topepitaxial layer is composed of a single crystal layer which may include,but is not limited to, silicon, germanium, silicon-germanium and a III-Vcompound semiconductor material. In another embodiment, substrate 100includes a top epitaxial layer above a middle insulator layer which isabove a lower bulk layer. For example, the insulator may be composed ofa material such as silicon dioxide, silicon nitride and siliconoxy-nitride.

Isolation regions 104 may be formed in the substrate 100. In anembodiment, isolation regions 104 separate a MOS device region and anon-volatile device region. In a particular embodiment, isolationregions 104 separate a high voltage field-effect transistor (HVFET)region 105, a SONOS FET region 108, an in/out select field-effecttransistor (10 FET) 106 and a low voltage field-effect transistor(LVFET) region 107. In an embodiment, substrate 100 is a siliconsubstrate, pad layer 102 is silicon oxide, and isolation regions 104 areshallow trench isolation regions. Pad layer 102 may be a native oxide,or alternatively a thermally grown or deposited layer. In an embodiment,pad layer 102 is thermally grown with a dry oxidation technique at atemperature of 800° C.-900° C. to a thickness of approximately 100angstroms (Å).

Dopants are then implanted into substrate 100 to form deep wells of anydopant type and concentration. FIGS. 1A-1D illustrate the separateformation of deep wells for each particular device region of thesubstrate, however, it is to be appreciated that deep wells can beformed for multiple device regions of the substrate at the same time. Ina particular embodiment illustrated in FIG. 1A, photoresist layer 110 isformed above pad layer 102 and patterned to form an opening above HVFETregion 105. Dopants are implanted into the substrate to form deep well111 in HVFET region 105 of the substrate. As illustrated in FIG. 1B,lithographic techniques, patterning, and implantation can be used toform a separate patterned photoresist layer 115 and deep well 112 in 10FET region 106. As illustrated in FIG. 1C, lithographic techniques,patterning, and implantation can be used to form a separate patternedphotoresist layer 117 and deep well 113 in LVFET region 107. Asillustrated in FIG. 1D, lithographic techniques, patterning, andimplantation can be used to form a separate patterned photoresist layer119 and deep well 114 in SONOS FET region 108. Dopants are alsoimplanted into substrate 100 to form doped channel region 116. Asillustrated in the embodiment of FIG. 1D, doped channel regions are notformed in the MOSFET regions 105, 106, or 107 so that out-diffusion doesnot occur during subsequent high temperature operations, and thebaseline MOSFET fabrication process for the doped channel region doesnot need to be altered.

In another embodiment, doped channel regions are also formed for the 10FET region 106, LVFET region 107 and HVFET region 105 during theimplantation operations illustrated in FIG. 1A-1D. In such anembodiment, the doped channel regions may diffuse during subsequentprocessing operations. Accordingly, such diffusion may need to befactored into a redesigned baseline MOSFET fabrication process.

Referring to FIGS. 2A-2B, pad layer 102 is then removed from thenon-volatile device region 108. In one embodiment, pad layer 102 isremoved utilizing a dry-wet technique. Referring to FIG. 2A, the bulk ofthe pad layer 102 is removed using any suitable dry etching technique,such as a fluorine-based chemistry. In an embodiment, at least 85% ofthe pad layer 102 above the non-volatile device region 108 is removedwith the dry etching technique. Referring to FIG. 2B, patternedphotoresist layer 119 is then removed utilizing a suitable photoresistremoval chemistry such as a sulfuric acid based chemistry, with anoxygen based plasma and ash, or a combination of both. A gate pre-cleanchemistry is then applied to the substrate to remove the remainder ofpad layer 102 from the surface of the substrate 100 in the non-volatiledevice region 108. In an embodiment, the pre-clean chemistry is a dilutehydrofluoric acid (HF) solution or buffered-oxide-etch (BOE) solutioncontaining HF and ammonium fluoride (NH₄F). In such an embodiment,minimal lateral etching of pad layer 102 occurs in the opening abovenon-volatile device region 108, and pad layer 102 is also slightlyetched above other regions of the substrate. In an embodiment, no morethan 25% of the original thickness of pad layer 102 is removed fromabove regions 105, 106 and 107.

As illustrated in the embodiment of FIG. 3A, a dielectric stack 120 isthen formed above the substrate 100. In an embodiment, the dielectricstack 120 includes a tunnel layer 122, a charge-trapping layer 124, anda sacrificial top layer 126. Tunnel layer 122 may be any material andhave any thickness suitable to allow charge carriers to tunnel into thecharge trapping layer under an applied gate bias while maintaining asuitable barrier to leakage when the device is unbiased. In anembodiment, tunnel layer 122 is silicon dioxide, silicon oxy-nitride, ora combination thereof. Tunnel layer 122 can be grown or deposited. Inone embodiment, tunnel layer 122 is grown by a thermal oxidationprocess. For example, a layer of silicon dioxide may be grown utilizingdry oxidation at 750 degrees centigrade (° C.)-800° C. in an oxygenatmosphere. In one embodiment, tunnel layer 122 is grown by a radicaloxidation process. For example, a layer of silicon dioxide may be grownutilizing in-situ steam generation (ISSG). In another embodiment, tunneldielectric layer 122 is deposited by chemical vapor deposition or atomiclayer deposition and is composed of a dielectric layer which mayinclude, but is not limited to silicon dioxide, silicon oxy-nitride,silicon nitride, aluminum oxide, hafnium oxide, zirconium oxide, hafniumsilicate, zirconium silicate, hafnium oxy-nitride, hafnium zirconiumoxide and lanthanum oxide. In another embodiment, tunnel layer 122 is abi-layer dielectric region including a bottom layer of a material suchas, but not limited to, silicon dioxide or silicon oxy-nitride and a toplayer of a material which may include, but is not limited to siliconnitride, aluminum oxide, hafnium oxide, zirconium oxide, hafniumsilicate, zirconium silicate, hafnium oxy-nitride, hafnium zirconiumoxide and lanthanum oxide. Thus, in one embodiment, tunnel layer 122includes a high-K dielectric portion. In a specific embodiment, tunnellayer 122 has a thickness of 18-20 angstroms.

Charge-trapping layer 124 may be any material and have a thickness whichis greater than the nominal thickness suitable to store charge, since atop portion of the charge trapping layer 124 is consumed during asubsequent processing operation. In an embodiment, charge trapping layeris 105-135 angstroms thick. In an embodiment, charge-trapping layer 124is formed by a chemical vapor deposition technique and is composed of adielectric material which may include, but is not limited tostoichiometric silicon nitride, silicon-rich silicon nitride, siliconoxy-nitride and oxygen rich silicon oxy-nitride. In an embodiment,charge trapping layer 126 includes multiple layers which are created bymodifying the flow rate of ammonia (NH₃) gas, nitrous oxide (N₂O) anddichlorosilane (SiH₂Cl₂). The flow of dichlorosilane can be increased tocreate a silicon rich film such as silicon nitride. The flow rate ofnitrous oxide can be increased to create an oxide rich film such assilicon oxy-nitride. The flow rate of ammonia can be increased to createa nitrogen rich film such as silicon nitride.

In one embodiment, charge-trapping layer 124 is composed of a lowerlayer and an upper layer, with the upper layer being more readilyoxidized than the lower layer. In an embodiment, the lower layer has agreater oxygen content than the upper layer, and the upper layer has agreater silicon content than the lower layer. For example, asillustrated in FIG. 3B, charge trapping layer 124 is composed of lowerlayer 124A and upper layer 124B. Lower layer 124A may comprise siliconoxy-nitride which contains more oxygen than the upper layer 124B, andthe upper layer 124B may comprise silicon nitride or silicon oxy-nitridewhich contains more silicon than the lower layer 124A. In an embodiment,lower layer 124A comprises 30%±5% oxygen, 20%±10% nitrogen, and 50%±10%silicon, by atomic percent. In an embodiment, the upper layer comprises0-7% oxygen, 30-57% nitrogen, and 43-65% silicon, by atomic percent. Inan embodiment, upper layer 124B comprises stoichiometric Si₃N₄. In anembodiment, the lower layer 124A is deposited by flowing dichlorosilane,ammonia and nitrous oxide into a chemical vapor deposition chamber at atemperature of approximately 750° C.-850° C. In an embodiment, lowerlayer 124A is 40-50 angstroms thick and upper layer 124B isapproximately 70-80 angstroms thick.

In another embodiment illustrated in FIG. 3C, charge trapping layer 124is composed of a lower layer, middle layer and upper layer. In anembodiment, lower layer 124A′ is oxide rich, middle layer 124C′ issilicon rich, and upper layer 124B′ is silicon and/or nitrogen rich. Inan embodiment, lower layer 124A′ is composed of silicon oxy-nitride,middle layer 124C′ is composed of silicon oxy-nitride, and upper layer124B′ is composed of silicon oxy-nitride or SiN₄. In an embodiment,lower layer 124A′ comprises 30%±5% oxygen, 20%±10% nitrogen, and 50%±10%silicon, by atomic percent. In an embodiment, middle layer 124C′comprises 5%±2% oxygen, 40%±10% nitrogen, and 55%+/−10% silicon, byatomic percent. In an embodiment, upper layer 124B′ comprises 0-7%oxygen, 30-57% nitrogen, and 43-65% silicon, by atomic percent. Thethickness of upper layer 124B′ is adjusted such that no more than 10% ofmiddle layer 124C′ is consumed during the operation described withregard to FIG. 7C. In an embodiment, lower layer 124A′ is 40-50angstroms thick, middle layer 124C′ is 40-50 angstroms thick, and upperlayer 124B′ is approximately 30 angstroms thick.

Referring again to FIG. 3A, a sacrificial top layer 126 is blanketdeposited above charge-trapping layer 124. In an embodiment, sacrificialtop layer 126 is silicon dioxide. In an embodiment, sacrificial toplayer 126 is deposited utilizing a chemical vapor deposition techniqueutilizing precursors such as dicholorisilane and nitrous oxide. In anembodiment, the entire dielectric stack 120 can be formed in a chemicalvapor deposition chamber such as a low pressure chemical vapordeposition (LPCVD) chamber. In one embodiment, tunnel layer 122 isthermally grown in the LPCVD chamber, while charge-trapping layer 124and sacrificial top layer 126 are both deposited in the LPCVD chamber.

The dielectric stack 120 is then patterned above the non-volatile deviceregion utilizing standard lithographic techniques as illustrated in theembodiment of FIG. 4 . In an embodiment, patterning comprises dryetching with a fluorine based chemistry. In an embodiment, etching stopson the pad layer 102 and does not expose substrate 100 in the MOS deviceregion 106. In such an embodiment, the pad layer 102 can protect the topsurface of substrate 100 from damage during a subsequent implantationoperation. In an alternative embodiment, pad layer 102 may be removedfrom the substrate utilizing a conventional pre-clean chemistry such asa diluted HF solution. In such an embodiment, doped channel regions mayhave already been formed in the substrate during a previous processingoperation, such as during the deep well formation illustrated in FIG.1A-1D.

Referring to the embodiment of FIG. 5A, a photoresist layer 128 isformed above the substrate and patterned above the MOS device region106. Dopants are implanted into the substrate 100 to form doped channelregion 130. In an embodiment, pad layer 102 protects the top surface ofsubstrate 100 from damage during the implantation operation. Thelithographic and implantation techniques may be repeated to form dopedchannel regions 131 and 133 as illustrated in FIG. 5B.

Referring to FIG. 6 , photoresist layer 128, pad layer 102 andsacrificial top layer 126 are removed. Photoresist layer 128 is removedutilizing any suitable photoresist removal chemistry. In an embodiment,pad layer 102 and sacrificial top layer 126 are simultaneously removed.In an embodiment, the substrate is exposed to a standard gate pre-cleanchemistry such as a dilute HF solution or BOE solution to remove thesacrificial top layer 126 and pad layer 102. As illustrated in FIG. 6 ,some amount of pad oxide layer 102 may remain underneath an edge oftunnel layer 122 depending upon exposure time to gate pre-cleanchemistry and method of forming tunnel layer 122.

Referring to the embodiment of FIG. 7A, gate dielectric layer 132 andblocking dielectric layer 134 are simultaneously formed. Layers 132 and134 may be formed utilizing any technique suitable for the formation ofa MOS device gate dielectric layer. In an embodiment, layers 132 and 134may be formed utilizing a technique capable of oxidizing both thesubstrate 100 and charge-trapping layer 124. In an embodiment gatedielectric layer 132 and blocking dielectric layer 134 are formedutilizing a radical oxidation technique, such as ISSG or plasma basedoxidation, and consume a portion of the substrate 100 andcharge-trapping layer 124, respectively.

In an embodiment, the thickness of the charge trapping layer 124 and thecomplete sacrificial layer 126 removal during the gate pre-cleanoperation illustrated in FIG. 6 can be tailored such that blockingdielectric layer 134 can be formed simultaneously with the gatedielectric layer 132 in accordance with an established MOSFET baselineprocess. Thus, charge trapping layer 124 can be integrated into anestablished baseline MOSFET process utilizing the same parameters asthose established in the baseline MOSFET process for forming gatedielectric layer 132 in a non-integrated scheme. In addition, the hightemperatures such as 750° C.-850° C. which may be used to form thedielectric gate stack 120 illustrated in FIG. 4 do not affect thebaseline dopant profile in the non-volatile device doped channel region130 because the tunnel layer 122 and charge-trapping layer 124 areformed prior to implanting the doped channel region 130, and blockingdielectric layer 134 is formed simultaneously with forming the gatedielectric layer 132. Accordingly, in such an embodiment any diffusionof channel dopants during formation of the gate dielectric layer 132 isaccounted for in the baseline MOSFET logic manufacturing process.

In an embodiment, blocking dielectric layer 134 may be composed of anymaterial and have any thickness suitable to maintain a barrier to chargeleakage without significantly decreasing the capacitance of thenon-volatile device gate stack. In one embodiment, the thickness of theblocking dielectric layer 134 is determined by the thickness for whichgate dielectric layer 132 is to be made, and the composition of theuppermost part of charge-trapping layer 124. In an embodimentillustrated in FIG. 7B and FIG. 7C, blocking dielectric layer 134 isgrown by consuming an upper portion of charge-trapping layer 124. In oneembodiment illustrated in FIG. 7B, blocking dielectric layer 134 isgrown by consuming a portion of upper layer 124B in FIG. 3B. In anembodiment, blocking dielectric layer 134 consumed approximately 25-35angstroms of blocking dielectric layer 134. In one embodimentillustrated in FIG. 7C, blocking dielectric layer 134 is grown byconsuming a portion of upper layer 124B in FIG. 3C. In an embodiment,the upper layer 124B′ is completely consumed to provide a blockingdielectric layer 134 with uniform composition. In an embodiment, upperlayer 124B′ is completely consumed and less than 10% of the thickness ofmiddle layer 124C′ is consumed during the formation of blockingdielectric layer 134. In an embodiment, upper layer 124B or 124B′ issilicon oxy-nitride containing approximately 30-57 atomic percentnitrogen. In such an embodiment, where blocking dielectric layer 134 isformed by ISSG, the blocking layer 134 may have a uniform siliconoxy-nitride composition containing less than 10 atomic percent nitrogen.In an embodiment, the thickness of the blocking dielectric layer 134 isapproximately 25-35 angstroms.

In another embodiment, gate dielectric layer 132 and/or blockingdielectric layer 134 can include multiple layers. In an embodimentillustrated in FIG. 7D, a second dielectric layer 132B/134B is depositedabove the oxidized portion 132A of the substrate and 134A of thecharge-trapping layer. In an embodiment the second layer 132B/134B mayhave a larger dielectric constant than the underlying oxidized portion132A/134A. For example, layer 132B/134B may comprise a material such as,but not limited to, aluminum oxide, hafnium oxide, zirconium oxide,hafnium oxy-nitride, hafnium zirconium oxide or lanthanum oxide.

Referring to FIG. 8 , in accordance with a specific embodiment aphotoresist layer 138 is formed above the substrate and patterned toform an opening above LVFET region 107. Gate dielectric layer 132 isthen removed from LVFET region 107. In an embodiment, gate dielectriclayer 132 is removed by exposure to a dilute HF solution, or BOEsolution. A replacement gate dielectric layer 136 is then formed abovethe exposed portion of substrate 100. Any suitable method for forming agate dielectric layer in a MOS memory device may be utilized such as,but not limited to, dry oxidation or ISSG. Photoresist layer 138 is thenremoved from the substrate utilizing any suitable photoresist removalchemistry.

Referring to the embodiment of FIG. 9 , a gate layer 140 is thendeposited above the substrate. Gate layer 140 may be composed of anyconductor or semiconductor material suitable for accommodating a biasduring operation of the non-volatile and MOS memory devices. Inaccordance with an embodiment, gate layer 140 is formed by a chemicalvapor deposition process and is composed of doped polycrystallinesilicon. In another embodiment, gate layer 140 is formed by physicalvapor deposition and is composed of a metal-containing material whichmay include but is not limited to, metal nitrides, metal carbides, metalsilicides, hafnium, zirconium, titanium, tantalum, aluminum, ruthenium,palladium, platinum, cobalt and nickel. In one embodiment, gate layer140 is a high work-function gate layer.

Referring to the embodiment of FIG. 10 , non-volatile and MOS devicegate stacks 146-149 may be formed through any process suitable toprovide substantially straight sidewalls and with high selectivity tothe substrate 100. In accordance with an embodiment, gate stacks 146-149are patterned by lithography and etching. In an embodiment, etching isanisotropic and utilizes gases such as, but not limited to, carbontetrafluoride (CF₄), O₂, hydrogen bromide (HBr) and chlorine (Cl₂). In aparticular embodiment, HVFET gate stack 147 comprises gate layer 145 andgate dielectric layer 132. SONOS FET gate stack 146 comprises gate layer142, blocking dielectric layer 134, charge-trapping layer 124, andtunnel layer 122. 10 FET gate stack 148 comprises gate layer 144 andgate dielectric layer 132. LVFET gate stack 149 comprises gate layer 147and gate dielectric layer 136.

Fabrication of MOS (e.g. MOSFET) and non-volatile (e.g. SONOS FET)memory devices may be completed utilizing conventional semiconductorprocessing techniques to form source and drain regions, spacers, andcontact regions.

Implementations and Alternatives

In another aspect the present disclosure is directed to multigate ormultigate-surface memory devices including charge-trapping regionsoverlying two or more sides of a channel formed on or above a surface ofa substrate, and methods of fabricating the same. Multigate devicesinclude both planar and non-planar devices. A planar multigate device(not shown) generally includes a double-gate planar device in which anumber of first layers are deposited to form a first gate below asubsequently formed channel, and a number of second layers are depositedthereover to form a second gate. A non-planar multigate device generallyincludes a horizontal or vertical channel formed on or above a surfaceof a substrate and surrounded on three or more sides by a gate.

FIG. 11A illustrates one embodiment of a non-planar multigate memorydevice 1100 including a charge-trapping region formed above a firstregion of a substrate, and a MOS device 1101 integrally formed adjacentthereto in a second region. Referring to FIG. 11A, the memory device1100, commonly referred to as a finFET, includes a channel 1102 formedfrom a thin film or layer of semiconducting material overlying a surface1104 on a substrate 1106 connecting a source 1108 and a drain 1110 ofthe memory device. The channel 1102 is enclosed on three sides by a finwhich forms a gate 1112 of the device. The thickness of the gate 1112(measured in the direction from source to drain) determines theeffective channel length of the device.

In accordance with the present disclosure, the non-planar multigatememory device 1100 of FIG. 1A can include a split charge-trappingregion. FIG. 11B is a cross-sectional view of a portion of thenon-planar memory device of FIG. 11A including a portion of thesubstrate 1106, channel 1102 and the gate 1112 illustrating a splitcharge-trapping region 1114. The gate 1112 further includes a tunneloxide 1116 overlying a raised channel 1102, a blocking dielectric 1118and a metal gate layer 1120 overlying the blocking layer to form acontrol gate of the memory device 1100. In some embodiments a dopedpolysilicon may be deposited instead of metal to provide a polysilicongate layer. The channel 1102 and gate 1112 can be formed directly onsubstrate 1106 or on an insulating or dielectric layer 1122, such as aburied oxide layer, formed on or over the substrate.

Referring to FIG. 11B, the split charge-trapping region 1114 includes atleast one lower or bottom charge-trapping layer 1124 comprising nitridecloser to the tunnel oxide 1116, and an upper or top charge-trappinglayer 1126 overlying the bottom charge-trapping layer. Generally, thetop charge-trapping layer 1126 comprises a silicon-rich, oxygen-leannitride layer and comprises a majority of a charge traps distributed inmultiple charge-trapping layers, while the bottom charge-trapping layer1124 comprises an oxygen-rich nitride or silicon oxynitride, and isoxygen-rich relative to the top charge-trapping layer to reduce thenumber of charge traps therein. By oxygen-rich it is meant wherein aconcentration of oxygen in the bottom charge-trapping layer 1124 is fromabout 15 to about 40%, whereas a concentration of oxygen in topcharge-trapping layer 1126 is less than about 5%.

In one embodiment, the blocking dielectric 1118 also comprises an oxide,such as an HTO, to provide an ONNO structure. The channel 1102 and theoverlying ONNO structure can be formed directly on a silicon substrate1106 and overlaid with a doped polysilicon gate layer 1120 to provide aSONNOS structure.

In some embodiments, such as that shown in FIG. 11B, the splitcharge-trapping region 1114 further includes at least one thin,intermediate or anti-tunneling layer 1128 comprising a dielectric, suchas an oxide, separating the top charge-trapping layer 1126 from thebottom charge-trapping layer 1124. The anti-tunneling layer 1128substantially reduces the probability of electron charge thataccumulates at the boundaries of the upper nitride layer 1126 duringprogramming from tunneling into the bottom nitride layer 1124, resultingin lower leakage current than for the conventional structures.

As with the embodiments described above, either or both of the bottomcharge-trapping layer 1124 and the top charge-trapping layer 1126 cancomprise silicon nitride or silicon oxynitride, and can be formed, forexample, by a CVD process including N₂O/NH₃ and DCS/NH₃ gas mixtures inratios and at flow rates tailored to provide a silicon-rich andoxygen-rich oxynitride layer. The second nitride layer of themulti-layer charge storing structure is then formed on the middle oxidelayer. The top charge-trapping layer 1126 has a stoichiometriccomposition of oxygen, nitrogen and/or silicon different from that ofthe bottom charge-trapping layer 1124, and may also be formed ordeposited by a CVD process using a process gas including DCS/NH₃ andN₂O/NH₃ gas mixtures in ratios and at flow rates tailored to provide asilicon-rich, oxygen-lean top nitride layer.

In those embodiments including an intermediate or anti-tunneling layer1128 comprising oxide, the anti-tunneling layer can be formed byoxidation of the bottom oxynitride layer, to a chosen depth usingradical oxidation. Radical oxidation may be performed, for example, at atemperature of 1000-1100° C. using a single wafer tool, or 800-900° C.using a batch reactor tool. A mixture of H₂ and O₂ gasses may beemployed at a pressure of 300-500 Tor for a batch process, or 10-15 Torusing a single vapor tool, for a time of 1-2 minutes using a singlewafer tool, or 30 min-1 hour using a batch process.

Finally, in those embodiments including a blocking dielectric 1118comprising oxide the oxide may be formed or deposited by any suitablemeans. In one embodiment the oxide of the blocking dielectric 1118 is ahigh temperature oxide deposited in a HTO CVD process. Alternatively,the blocking dielectric 1118 or blocking oxide layer may be thermallygrown, however it will be appreciated that in this embodiment the topnitride thickness may be adjusted or increased as some of the topnitride will be effectively consumed or oxidized during the process ofthermally growing the blocking oxide layer. A third option is to oxidizethe top nitride layer to a chosen depth using radical oxidation.

A suitable thickness for the bottom charge-trapping layer 1124 may befrom about 30 Å to about 80 Å (with some variance permitted, for example±10 Å), of which about 5-20 Å may be consumed by radical oxidation toform the anti-tunneling layer 1128. A suitable thickness for the topcharge-trapping layer 1126 may be at least 30 Å. In certain embodiments,the top charge-trapping layer 1126 may be formed up to 130 Å thick, ofwhich 30-70 Å may be consumed by radical oxidation to form the blockingdielectric 1118. A ratio of thicknesses between the bottomcharge-trapping layer 124 and top charge-trapping layer 1126 isapproximately 1:1 in some embodiments, although other ratios are alsopossible.

In other embodiments, either or both of the top charge-trapping layer1126 and the blocking dielectric 1118 may comprise a high K dielectric.Suitable high K dielectrics include hafnium based materials such asHfSiON, HfSiO or HfO, Zirconium based material such as ZrSiON, ZrSiO orZrO, and Yttrium based material such as Y₂O₃.

In the embodiment shown in FIG. 1A, the MOS device 1101 is also afinFET, and includes a channel 1103 formed from a thin film or layer ofsemiconducting material overlying the surface 1104 on the substrate 1106connecting a source 1105 and a drain 1107 of the MOS device. The channel1103 is also enclosed on three sides by the fin which forms a gate ofthe device. However, the MOS device 1101 can also include a planardevice, as shown in FIG. 11C, formed in or on the surface of thesubstrate by any of methods or embodiments described above with respectto FIGS. 1A-10 . For example, in one embodiment the MOS device 1101 is aFET including a gate 1130 and gate dielectric layer 1132 overlying adoped channel region 1134 in a deep well 1136 formed in a second region1138 of the substrate, and separated from the memory device 1100 in thefirst region 1140 by an isolation region 1142, such as a shallow trenchisolation region. In certain embodiments, forming the MOS device 1101comprises performing a thermal oxidation to simultaneously form the gatedielectric layer 1132 of the MOS device while thermally reoxidizing theblocking layer 1118. In one particular embodiment, the method canfurther comprise performing a nitridation process as described above tosimultaneously nitridize the gate dielectric layer 1132 and the blockinglayer 1118.

FIG. 12 illustrates a flow diagram depicting sequences of particularmodules employed in the fabrication process of a non-volatile chargetrap memory device integrated with a logic MOS device, in accordancewith particular embodiments of the present invention. Referring to FIG.12 , the method begins with formation of a pad dielectric layer of a MOSdevice above a first or MOS region of a substrate (module 1202). A paddielectric layer may be deposited or grown above by any conventionaltechnique, such as, but not limited to thermally grown with a dryoxidation technique at a temperature of 800° C.-900° C. to a thicknessof approximately 100 Å. To include a non-planar, multigate nonvolatilememory device on the same substrate as the MOS device, a thin film ofsemiconducting material is formed over a surface of the substrate in asecond, memory device region, and patterned to form a channel connectinga source and a drain of the memory device (module 1204). The thin filmof semiconducting material may be composed of a single crystal of amaterial which may include, but is not limited to, silicon, germanium,silicon-germanium or a III-V compound semiconductor material depositedby any conventional technique, such as, but not limited to epitaxialdeposition in a LPCVD chamber.

A patterned dielectric stack of the non-volatile memory device is formedover the second, memory device region, and patterned to remove thatportion of the dielectric stack not overlying the channel (module 1206).The dielectric stack generally includes a tunnel layer, acharge-trapping layer, and a sacrificial top layer overlying thecharge-trapping layer. The individual layers of the dielectric stack caninclude silicon oxides, silicon nitrides and silicon nitrides havingvarious stoichiometric compositions of oxygen, nitrogen and/or silicon,and may deposited or grown by any conventional technique, such as, butnot limited to thermally grown oxides, radical oxidation and CVDprocesses, as described above.

Next, in some embodiments the sacrificial layer is removed from the topof the dielectric stack while the pad dielectric layer is simultaneouslyremoved from the first region of the substrate (module 1208), and a gatedielectric layer formed above the first region of the substrate while ablocking dielectric layer is simultaneously formed above thecharge-trapping layer (module 1210). Generally, the sacrificial layerand pad layer are removed by exposing the substrate to a standard gatepre-clean chemistry such as a dilute HF solution or BOE solution toremove. The gate dielectric layer and the blocking dielectric layer maybe formed utilizing a technique capable of oxidizing both the substrateand charge-trapping layer. In one embodiment the gate dielectric layerand blocking dielectric layer are formed utilizing a radical oxidationtechnique, such as ISSG or plasma based oxidation, which consume aportion of the substrate and charge-trapping layer, respectively.

In another embodiment, shown in FIGS. 13A and 13B, the memory device caninclude a nanowire channel formed from a thin film of semiconductingmaterial overlying a surface on a substrate connecting a source and adrain of the memory device. By nanowire channel it is meant a conductingchannel formed in a thin strip of crystalline silicon material, having amaximum cross-sectional dimension of about 10 nanometers (nm) or less,and more preferably less than about 6 nm. Optionally, the channel can beformed to have <100> surface crystalline orientation relative to a longaxis of the channel.

Referring to FIG. 13A, the memory device 1300 includes a horizontalnanowire channel 1302 formed from a thin film or layer of semiconductingmaterial on or overlying a surface on a substrate 1306, and connecting asource 1308 and a drain 1310 of the memory device. In the embodimentshown, the device has a gate-all-around (GAA) structure in which thenanowire channel 1302 is enclosed on all sides by a gate 1312 of thedevice. The thickness of the gate 1312 (measured in the direction fromsource to drain) determines the effective channel length of the device.

In accordance with the present disclosure, the non-planar multigatememory device 1300 of FIG. 13A can include a split charge-trappingregion. FIG. 13B is a cross-sectional view of a portion of thenon-planar memory device of FIG. 13A including a portion of thesubstrate 1306, nanowire channel 1302 and the gate 1312 illustrating asplit charge-trapping region. Referring to FIG. 13B, the gate 1312includes a tunnel oxide 1314 overlying the nanowire channel 1302, asplit charge-trapping region, a blocking dielectric 1316 and a gatelayer 1318 overlying the blocking layer to form a control gate of thememory device 1300. The gate layer 1318 can comprise a metal or a dopedpolysilicon. The split charge-trapping region includes at least oneinner charge-trapping layer 1320 comprising nitride closer to the tunneloxide 1314, and an outer charge-trapping layer 1322 overlying the innercharge-trapping layer. Generally, the outer charge-trapping layer 1322comprises a silicon-rich, oxygen-lean nitride layer and comprises amajority of a charge traps distributed in multiple charge-trappinglayers, while the inner charge-trapping layer 1320 comprises anoxygen-rich nitride or silicon oxynitride, and is oxygen-rich relativeto the outer charge-trapping layer to reduce the number of charge trapstherein.

In some embodiments, such as that shown, the split charge-trappingregion further includes at least one thin, intermediate oranti-tunneling layer 1324 comprising a dielectric, such as an oxide,separating outer charge-trapping layer 1322 from the innercharge-trapping layer 1320. The anti-tunneling layer 1324 substantiallyreduces the probability of electron charge that accumulates at theboundaries of outer charge-trapping layer 1322 during programming fromtunneling into the inner charge-trapping layer 1320, resulting in lowerleakage current.

As with the embodiment described above, either or both of the innercharge-trapping layer 1320 and the outer charge-trapping layer 1322 cancomprise silicon nitride or silicon oxynitride, and can be formed, forexample, by a CVD process including N₂O/NH₃ and DCS/NH₃ gas mixtures inratios and at flow rates tailored to provide a silicon-rich andoxygen-rich oxynitride layer. The second nitride layer of themulti-layer charge storing structure is then formed on the middle oxidelayer. The outer charge-trapping layer 1322 has a stoichiometriccomposition of oxygen, nitrogen and/or silicon different from that ofthe inner charge-trapping layer 1320, and may also be formed ordeposited by a CVD process using a process gas including DCS/NH₃ andN₂O/NH₃ gas mixtures in ratios and at flow rates tailored to provide asilicon-rich, oxygen-lean top nitride layer.

In those embodiments including an intermediate or anti-tunneling layer1324 comprising oxide, the anti-tunneling layer can be formed byoxidation of the inner charge-trapping layer 1320, to a chosen depthusing radical oxidation. Radical oxidation may be performed, forexample, at a temperature of 1000-1100° C. using a single wafer tool, or800-900° C. using a batch reactor tool. A mixture of H₂ and O₂ gassesmay be employed at a pressure of 300-500 Tor for a batch process, or10-15 Tor using a single vapor tool, for a time of 1-2 minutes using asingle wafer tool, or 30 min-1 hour using a batch process.

Finally, in those embodiments in which the blocking dielectric 1316comprises oxide, the oxide may be formed or deposited by any suitablemeans. In one embodiment the oxide of blocking dielectric 1316 is a hightemperature oxide deposited in a HTO CVD process. Alternatively, theblocking dielectric 1316 or blocking oxide layer may be thermally grown,however it will be appreciated that in this embodiment the thickness ofthe outer charge-trapping layer 1322 may need to be adjusted orincreased as some of the top nitride will be effectively consumed oroxidized during the process of thermally growing the blocking oxidelayer.

A suitable thickness for the inner charge-trapping layer 1320 may befrom about 30 Å to about 80 Å (with some variance permitted, for example±10 Å), of which about 5-20 Å may be consumed by radical oxidation toform the anti-tunneling layer 1324. A suitable thickness for the outercharge-trapping layer 1322 may be at least 30 Å. In certain embodiments,the outer charge-trapping layer 1322 may be formed up to 130 Å thick, ofwhich 30-70 Å may be consumed by radical oxidation to form the blockingdielectric 1316. A ratio of thicknesses between the innercharge-trapping layer 1320 and the outer charge-trapping layer 1322 isapproximately 1:1 in some embodiments, although other ratios are alsopossible.

In other embodiments, either or both of the outer charge-trapping layer1322 and the blocking dielectric 1316 may comprise a high K dielectric.Suitable high K dielectrics include hafnium based materials such asHfSiON, HfSiO or HfO, Zirconium based material such as ZrSiON, ZrSiO orZrO, and Yttrium based material such as Y₂O₃.

FIG. 13C illustrates a cross-sectional view of a vertical string ofnon-planar multigate devices 1300 of FIG. 13A arranged in a Bit-CostScalable or BiCS architecture 1326. The architecture 1326 consists of avertical string or stack of non-planar multigate devices 1300, whereeach device or cell includes a channel 1302 overlying the substrate1306, and connecting a source and a drain (not shown in this figure) ofthe memory device, and having a gate-all-around (GAA) structure in whichthe nanowire channel 1302 is enclosed on all sides by a gate 1312. TheBiCS architecture reduces number of critical lithography steps comparedto a simple stacking of layers, leading to a reduced cost per memorybit.

In another embodiment, the memory device is or includes a non-planardevice comprising a vertical nanowire channel formed in or from asemiconducting material projecting above or from a number of conducting,semiconducting layers on a substrate. In one version of this embodiment,shown in cut-away in FIG. 14A, the memory device 1400 comprises avertical nanowire channel 1402 formed in a cylinder of semiconductingmaterial connecting a source 1404 and drain 1406 of the device. Thechannel 1402 is surrounded by a tunnel oxide 1408, a charge-trappingregion 1410, a blocking layer 1412 and a gate layer 1414 overlying theblocking layer to form a control gate of the memory device 1400. Thechannel 1402 can include an annular region in an outer layer of asubstantially solid cylinder of semiconducting material, or can includean annular layer formed over a cylinder of dielectric filler material.As with the horizontal nanowires described above, the channel 1402 cancomprise polysilicon or recrystallized polysilicon to form amonocrystalline channel. Optionally, where the channel 1402 includes acrystalline silicon, the channel can be formed to have <100> surfacecrystalline orientation relative to a long axis of the channel.

In some embodiments, such as that shown in FIG. 14B, the charge-trappingregion 1410 can be a split charge-trapping region including at least afirst or inner charge trapping layer 1416 closest to the tunnel oxide1408, and a second or outer charge trapping layer 1418. Optionally, thefirst and second charge trapping layers can be separated by anintermediate oxide or anti-tunneling layer 1420.

As with the embodiments described above, either or both of the firstcharge trapping layer 1416 and the second charge trapping layer 1418 cancomprise silicon nitride or silicon oxynitride, and can be formed, forexample, by a CVD process including N₂O/NH₃ and DCS/NH₃ gas mixtures inratios and at flow rates tailored to provide a silicon-rich andoxygen-rich oxynitride layer.

Finally, either or both of the second charge trapping layer 1418 and theblocking layer 1412 may comprise a high K dielectric, such as HfSiON,HfSiO, HfO, ZrSiON, ZrSiO, ZrO, or Y₂O₃.

A suitable thickness for the first charge trapping layer 1416 may befrom about 30 Å to about 80 Å (with some variance permitted, for example±10 Å), of which about 5-20 Å may be consumed by radical oxidation toform the anti-tunneling layer 1420. A suitable thickness for the secondcharge trapping layer 1418 may be at least 30 Å, and a suitablethickness for the blocking dielectric 1412 may be from about 30-70 Å.

The memory device 1400 of FIG. 14A can be made using either a gate firstor a gate last scheme. FIG. 15A-F illustrate a gate first scheme forfabricating the non-planar multigate device of FIG. 14A. FIG. 16A-Fillustrate a gate last scheme for fabricating the non-planar multigatedevice of FIG. 14A.

Referring to FIG. 15A, in a gate first scheme a first or lowerdielectric layer 1502, such as a blocking oxide, is formed over a first,doped diffusion region 1504, such as a source or a drain, in a substrate1506. A gate layer 1508 is deposited over the first dielectric layer1502 to form a control gate of the device, and a second or upperdielectric layer 1510 formed thereover. As with embodiments describedabove, the first and second dielectric layers 1502, 1510, can bedeposited by CVD, radical oxidation or be formed by oxidation of aportion of the underlying layer or substrate. The gate layer 1508 cancomprise a metal deposited or a doped polysilicon deposited by CVD.Generally the thickness of the gate layer 1508 is from about 40-50 Å,and the first and second dielectric layers 1502, 1510, from about 20-80Å.

Referring to FIG. 15B, a first opening 1512 is etched through theoverlying gate layer 1508, and the first and second dielectric layers1502, 1510, to the diffusion region 1504 in the substrate 1506. Next,layers of a tunneling oxide 1514, charge-trapping region 1516, andblocking dielectric 1518 are sequentially deposited in the opening andthe surface of the upper dielectric layer 1510 planarize to yield theintermediate structure shown in FIG. 15C.

Although not shown, it will be understood that as in the embodimentsdescribed above the charge-trapping region 1516 can include a splitcharge-trapping region comprising at least one lower or bottomcharge-trapping layer closer to the tunnel oxide 1514, and an upper ortop charge-trapping layer overlying the bottom charge-trapping layer.Generally, the top charge-trapping layer comprises a silicon-rich,oxygen-lean nitride layer and comprises a majority of a charge trapsdistributed in multiple charge-trapping layers, while the bottomcharge-trapping layer comprises an oxygen-rich nitride or siliconoxynitride, and is oxygen-rich relative to the top charge-trapping layerto reduce the number of charge traps therein. In some embodiments, thesplit charge-trapping region 1516 further includes at least one thin,intermediate or anti-tunneling layer comprising a dielectric, such as anoxide, separating the top charge-trapping layer from the bottomcharge-trapping layer.

Next, a second or channel opening 1520 is anisotropically etched throughtunneling oxide 1514, charge-trapping region 1516, and blockingdielectric 1518, FIG. 15D. Referring to FIG. 15E, a semiconductingmaterial 1522 is deposited in the channel opening to form a verticalchannel 1524 therein. The vertical channel 1524 can include an annularregion in an outer layer of a substantially solid cylinder ofsemiconducting material, or, as shown in FIG. 15E, can include aseparate, layer semiconducting material 1522 surrounding a cylinder ofdielectric filler material 1526.

Referring to FIG. 15F, the surface of the upper dielectric layer 1510 isplanarized and a layer of semiconducting material 1528 including asecond, doped diffusion region 1530, such as a source or a drain, formedtherein deposited over the upper dielectric layer to form the deviceshown.

Referring to FIG. 16A, in a gate last scheme a dielectric layer 1602,such as an oxide, is formed over a sacrificial layer 1604 on a surfaceon a substrate 1606, an opening etched through the dielectric andsacrificial layers and a vertical channel 1608 formed therein. As withembodiments described above, the vertical channel 1608 can include anannular region in an outer layer of a substantially solid cylinder ofsemiconducting material 1610, such as a polycrystalline ormonocrystalline silicon, or can include a separate, layer semiconductingmaterial surrounding a cylinder of dielectric filler material (notshown). The dielectric layer 1602 can comprise any suitable dielectricmaterial, such as a silicon oxide, capable of electrically isolating thesubsequently formed gate layer of the memory device 1400 from anoverlying electrically active layer or another memory device. Thesacrificial layer 1604 can comprise any suitable material that can beetched or removed with high selectivity relative to the material of thedielectric layer 1602, substrate 1606 and vertical channel 1608.

Referring to FIG. 16B, a second opening 1612 is etched through theetched through the dielectric and sacrificial layers 1602, 1604, to thesubstrate 1506, and the sacrificial layer 1604 etched or removed. Thesacrificial layer 1604 can comprise any suitable material that can beetched or removed with high selectivity relative to the material of thedielectric layer 1602, substrate 1606 and vertical channel 1608. In oneembodiment the sacrificial layer 1604 comprises silicon dioxide that canbe removed by a buffered oxide (BOE) etch.

Referring to FIGS. 16C and 16D, layers of a tunneling oxide 1614,charge-trapping region 1616, and blocking dielectric 1618 aresequentially deposited in the opening. The surface of the dielectriclayer 1602 is planarized to yield the intermediate structure shown inFIG. 16C. In some embodiments, such as that shown in FIG. 16D, thecharge-trapping region 1616 can be a split charge-trapping regionincluding at least a first or inner charge trapping layer 1616 a closestto the tunnel oxide 1614, and a second or outer charge trapping layer1616 b. Optionally, the first and second charge trapping layers can beseparated by an intermediate oxide or anti-tunneling layer 1620.

Next, a gate layer 1622 is deposited into the second opening 1612 andthe surface of the upper dielectric layer 1602 planarized to yield theintermediate structure illustrated in FIG. 16E. As with embodimentsdescribed above, the gate layer 1622 can comprise a metal deposited or adoped polysilicon. Finally, an opening 1624 is etched through the gatelayer 1622 to form control gate of separate memory devices 1626.

In the foregoing specification, various embodiments of the inventionhave been described for integrating non-volatile and MOS memory devices.In an embodiment, the dielectric gate stack of the non-volatile devicecan be integrated into the MOS memory process flow without affecting thebaseline process for forming the MOS device channel dopants and gatedielectric layer. It is appreciated that embodiments are not so limited.It will, however, be evident that various modifications and changes maybe made thereto without departing from the broader spirit and scope ofthe invention as set forth in the appended claims. The specification anddrawings are, accordingly, to be regarded in an illustrative senserather than a restrictive sense.

What is claimed is:
 1. A non-volatile memory device, comprising: acontrol gate layer over a semiconductor substrate; a through holevertically penetrating the control gate layer; a blocking dielectriclayer, a charge storing layer and a tunnel dielectric layer in thisorder on a sidewall of the through hole; a semiconductor layer on thetunnel dielectric layer within the through hole; and a dielectric fillermaterial filling the through hole such that the semiconductor layersurrounds the dielectric filler material, wherein the charge storinglayer comprises a first charge trapping layer and a second chargetrapping layer, the first charge trapping layer is closer to the tunneldielectric layer and comprises a first oxygen-rich silicon oxynitridelayer, and the second charge trapping layer is closer to the blockingdielectric layer and comprises a second oxygen-lean silicon oxynitridelayer.
 2. The non-volatile memory device in claim 1, wherein the controlgate layer is immediately adjacent to and sandwiched between a lowerdielectric layer and an upper dielectric layer.
 3. The non-volatilememory device in claim 2, wherein the through hole verticallypenetrating the lower and upper dielectric layers.
 4. The non-volatilememory device in claim 1, wherein the semiconductor layer is apolysilicon layer.
 5. The non-volatile memory device in claim 1, whereinthe control gate layer is formed with doped polysilicon material.
 6. Thenon-volatile memory device in claim 1, wherein the control gate layer isformed with high working function material.
 7. The non-volatile memorydevice in claim 1, wherein the second charge trapping layer comprises ahigh K dielectric.
 8. The non-volatile memory device in claim 7, whereinthe high K dielectric comprises a compound including hafnium (Hf) orzirconium (Zr).
 9. The non-volatile memory device in claim 1, furthercomprising an anti-tunneling layer disposed between the first and secondcharge trapping layers.
 10. The non-volatile memory device in claim 1,wherein the blocking dielectric layer comprises a high K dielectriccompound including hafnium (Hf) or zirconium (Zr).
 11. The non-volatilememory device in claim 1, further comprising forming an anti-tunnellayer separating the first oxygen-rich silicon oxynitride layer and thesecond oxygen-lean silicon oxynitride layer.
 12. The non-volatile memorydevice in claim 11, wherein the anti-tunnel layer comprising an oxidelayer.
 13. A non-volatile memory device, comprising: a control gatelayer over a semiconductor substrate; a through hole verticallypenetrating the control gate layer; a blocking dielectric layer, acharge storing layer and a tunnel dielectric layer in this order on asidewall of the through hole; a semiconductor layer on the tunneldielectric layer within the through hole; and a dielectric fillermaterial within the through hole such that the semiconductor layersurrounds the dielectric filler material, wherein the charge storinglayer comprises a first charge trapping layer and a second chargetrapping layer; wherein the first charge trapping layer is closer to thetunnel dielectric layer and comprises a first oxygen-rich siliconoxynitride layer, the second charge trapping layer is closer to theblocking dielectric layer and comprises a second oxygen-lean siliconoxynitride layer.
 14. The non-volatile memory device in claim 13,wherein the control gate layer is immediately adjacent to and sandwichedbetween a lower dielectric layer and an upper dielectric layer.
 15. Thenon-volatile memory device in claim 14, wherein the through holevertically penetrating the lower and upper dielectric layers.
 16. Thenon-volatile memory device in claim 13, wherein the semiconductor layeris a polysilicon layer.
 17. The non-volatile memory device in claim 13,wherein the control gate layer is formed with doped polysiliconmaterial.
 18. The non-volatile memory device in claim 13, wherein thecontrol gate layer is formed with high working function material.